Work

Wafer defect detection based on polarization modulation

Year: 2024

Type: conference-paper

Source: Advanced Optical Manufacturing Technologies and Applications and International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM)

DOI: 10.1117/12.3047669

Authors: Zhen Zhang, Min Xu, Fei Yu

Institution: Fudan University

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404316843

FWCI:

Cites: 7

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Related to: 10