Work

Formation of tunable diamond micro- and nanopillars for field effect enhancement applications

Year: 2024

Type: article

Abstract: We developed a process for the fabrication of tunable single crystal diamond micro- and nanopillars , with tip widths ranging from 40 to 460 nm, densities ranging from 0.5 to 53.5 pillars/μm 2 , and heights greater than 4.5 μm. A self-assembled Au nanodot ensemble etch mask was formed from an annealed Au thin film . The nanodot diameter and density can be tuned using the initial film thickness. The pillars were etched from the nanodot mask using an RIE O 2 plasma, which has infinite selectivity for the diamond when applied at low RF powers (50 W). Finally, the pillars can be sharpened to ∼40 nm tip widths by annealing in air at 650 °C. These pillars can be used for applications such as field effect enhancement of diamond photocathode devices, enhancement of optical emission from N-V centers, and antireflective coatings.

Source: Materials Science in Semiconductor Processing

DOI: 10.1016/j.mssp.2024.109119

Authors: Dylan M. Evans, Clint D. Frye

Institution: Lawrence Livermore National Laboratory

Language: English

Topic: Diamond and Carbon-based Materials Research

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $3,060

Funders: U.S. Department of Energy, Laboratory Directed Research and Development, Lawrence Livermore National Laboratory