Work

Galaxy Microstructure: An Absolute Encoding Method for Planar 3-DOF Nanoscale Positioning Measurement

Year: 2024

Type: article

Source: IEEE Transactions on Instrumentation and Measurement

DOI: 10.1109/tim.2024.3500042

Authors: Zijian Zhu, Chenyang Zhao

Institution: Harbin Institute of Technology

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G1555035566

OpenAlex ID: W4404480706

FWCI: 0.271

Cites: 31

Cited by: 2

Related to: 10