Work

High-quality temperature-complementary bulk acoustic wave resonators fabricated with strippable single-crystalline AlN films grown on sapphire

Year: 2024

Type: article

Source: Applied Physics Letters

DOI: 10.1063/5.0231483

Authors: Tianyou Luo, Yinuo Zhang, Zhipeng Chen, Kaibin Xu, Peidong Ouyang, Han Hu, Chenyang Li, Yuhan Zhu, Xinyan Yi, Guoqiang Li

Institutions: State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Shanxi-Zheda Institute of Advanced Materials and Chemical Engineering

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Key Research and Development Program of China

Awards: G4934913847, G6091591738

OpenAlex ID: W4404485512

FWCI: 0.533

Cites: 42

Cited by: 5

Related to: 10