Work

Parametric Extraction Method of Equivalent Circuit for SOI MEMS Pressure Sensor Rapid SPICE Simulation

Year: 2024

Type: article

Source: IEEE Sensors Letters

DOI: 10.1109/lsens.2024.3502156

Authors: Artem T. Tulaev, V. V. Loboda

Institutions: State Research Center of the Russian Federation, Peter the Great St. Petersburg Polytechnic University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404520287

FWCI: 0.103

Cites: 23

Cited by: 1

Related to: 10