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Optical constants of magnetron sputtered aluminum in the range 17–1300 eV with improved accuracy and ultrahigh resolution in the L absorption edge region

Year: 2024
Type: article
Abstract: This work determines a new set of EUV/x-ray optical constants for aluminum (Al), one of the most important materials in science and technology. Absolute photoabsorption (transmittance) measurements in the 17–1300 eV spectral range were performed on freestanding Al films protected by carbon (C) layers, to prevent oxidation. The dispersive portion of the refractive index was obtained via the Kramers–Kronig transformation. Our data provide significant improvements in accuracy compared to previously tabulated values and reveal fine structure in the Al L1 and L2,3 regions, with photon energy step sizes as small as 0.02 eV. The implications of this work in the successful realization of EUV/x-ray instruments and in the validation of atomic and molecular physics models are also discussed.
DOI: 10.1063/5.0233781
Authors: Catherine Burcklen, Franck Delmotte, Jennifer Alameda, Farhad Salmassi, Eric Gullikson, Regina Soufli
Institutions: Lawrence Livermore National Laboratory, Centre National de la Recherche Scientifique, Université Paris-Saclay, Institut d’Optique Graduate School, Laboratoire Charles Fabry, Lawrence Berkeley National Laboratory
Language: English
Subfield: Radiation
Open Access status: hybrid
Estimated APC paid: $3,500
Funders: U.S. Department of Energy, Centre National de la Recherche Scientifique, Université Paris-Saclay, Laboratory Directed Research and Development, Lawrence Livermore National Laboratory, Lawrence Berkeley National Laboratory
Awards: G1356433355, G1398330795, G1400103020, G14554683, G1498294715, G2145270357, G3571461640, G3669113783, G4744444288, G5080053909, G5630301777, G895790057, G991281326
OpenAlex ID: W4404542009
FWCI: 0.878
Cites: 46
Cited by: 3
Related to: 10