Silicon and silicon nitride cylindrical microresonators made of optical fibers with sputter deposition
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3036300
Authors: Natalya A. Makarova, Vadim S. Terentyev, Ilya D. Vatnik
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4404560075
