Work

A quasi-common-path heterodyne grating interferometer for six-degree-of-freedom measurement

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3036386

Authors: Can Cui, Menghan Yang, Lifu Liu, Pengbo Zhao, Lyuye Gao, Xinghui Li

Institution: Tsinghua University

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404560137

FWCI: 2.586

Cites: 32

Cited by: 2

Related to: 10