Work

Multi-reference fringe locking technique for interference lithography

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3036327

Authors: Jingwen Li, Zijian Zhong, Changfeng Shao, Xinghui Li

Institution: Tsinghua University

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404560177

FWCI: 0.211

Cites: 27

Cited by: 1

Related to: 10