Work

An ultra-precision and real-time algorithm for 6-DOF displacements based on four grating interferometers

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3036416

Authors: Lifu Liu, Can Cui, Menghan Yang, Pengbo Zhao, Lvye Gao, Xinghui Li

Institution: Tsinghua University

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404560518

FWCI: 2.588

Cites: 38

Cited by: 2

Related to: 10