Work

A grating interferometer for improving optical subdivision in Z-axis measurement

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3036434

Authors: Pengbo Zhao, Lyuye Gao, Can Cui, Yu Ma, Menghan Yang, Lifu Liu, Xinghui Li

Institution: Tsinghua University

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404560590

FWCI: 5.175

Cites: 19

Cited by: 4

Related to: 10