Work

High-accuracy mirror surface measurement using three scanning interferometric displacement sensors

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3045125

Authors: Jiezhuo Wang, Guang Zhou, Weizheng Lei, Xiaohao Dong, Jie Wang

Institutions: Shanghai Advanced Research Institute, Shanghai Institute of Applied Physics, University of Chinese Academy of Sciences, ShanghaiTech University

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404560654

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Cites: 13

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Related to: 10