Work

Calibrating multispot illumination for asphere metrology using shear-interferometry

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3037594

Authors: André F. Müller, Beñat Gutiérrez-Cañas Pazos, Nikodem Mitura, Gerd Ehret, Claas Falldorf, Ralf B. Bergmann

Institutions: Bremen Institute for Applied Beam Technology, Physikalisch-Technische Bundesanstalt, University of Bremen

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404560709

FWCI:

Cites: 3

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Related to: 10