Work

Design of a MEMS Accelerometer in COMSOL Multiphysics and a Pickup Circuit Model in Matlab Simulink

Year: 2024

Type: conference-paper

Source: International Conference on Electrical Engineering and Photonics (EExPolytech)

DOI: 10.1109/eexpolytech62224.2024.10755840

Authors: Semyon Stolbov, Vera Loboda

Institution: Peter the Great St. Petersburg Polytechnic University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404564427

FWCI: 0.781

Cites: 4

Cited by: 1

Related to: 10