High-Precision Robotic Arm for Silicon Wafer Handling and Alignment in Small-Scale Semiconductor Fabrication
Year: 2024
Type: conference-paper
Authors: Luke Bassett, Maria Apostle, Federica Aveta
Institution: Wentworth Institute of Technology
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4404564813