Work

Preparation Of VO2 Thin Films On 6H-SiC Substrate By Magnetron Sputtering

Year: 2024

Type: conference-paper

Source: International Conference on Electrical Engineering and Photonics (EExPolytech)

DOI: 10.1109/eexpolytech62224.2024.10755528

Authors: Ilya Neustroev, Andrey Tsymbalyuk, Roman Platonov, Andrey Komlev, Andrey Altynnikov, Semyon Khakhulin

Institution: Saint Petersburg State Electrotechnical University

Language: English

Topic: Transition Metal Oxide Nanomaterials

Subfield: Polymers and Plastics

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404565030

FWCI:

Cites: 16

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Related to: 10