Improving contact lithography resolution using index matching fluids
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3036446
Authors: Yufeng Wei, Tianshi Lu, Changfeng Shao, Xinghui Li
Institution: Tsinghua University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4404632399