Advanced absorber and compensation repair for EUV reticles utilizing a novel e-beam-based repair technique
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3038766
Authors: Joseph M. Rodriguez, Scott Chegwidden, Andrew Elliott, Lingxuan Peng, Dinumol Devasia, Nathan Wilcox, Safak Sayan, Andrew Ridley, Franz-Josef Eberle, Michael Budach, Chanya Nguyen, Felix Hermanns, Horst Schneider, Klaus Edinger
Institution: Intel (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4404632586