Work

Conversion Dynamics of Small Silane Impurities in a Glow Discharge in Helium at Low Pressure

Year: 2024

Type: article

Source: High Energy Chemistry

DOI: 10.1134/s0018143924700887

Authors: A. I. Saifutdinov, A. A. Ulanova, A. A. Saifutdinova, C. Zhou, C. Yuan

Institutions: Kazan State Technical University named after A. N. Tupolev, Harbin Institute of Technology

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404644469

FWCI: 0.308

Cites: 35

Cited by: 3

Related to: 10