Work

Simulation of Surface Wave Microwave Discharge in Argon at Low Pressures

Year: 2024

Type: dissertation

Source: High Energy Chemistry

DOI: 10.1134/s0018143924700929

Authors: A. A. Saifutdinova, S. S. Sysoev, N. P. Germanov, D. D. Gushchin

Institutions: Kazan State Technical University named after A. N. Tupolev, St Petersburg University

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404644480

Cites: 36

Cited by: 3

Related to: 10