Work

Balanced truncation model reduction for laser heating wafer model in frequency restricted domain

Year: 2024

Type: article

Abstract: Modeling and simulating laser heating phenomena are crucial for optimizing manufacturing processes and ensuring high-quality final products. A major challenge in semiconductor manufacturing is achieving accurate, real-time temperature control during wafer heating. To reduce the computational burden of complex mathematical models, low-dimensional reduced models can be employed. In this paper, we develop a mathematical model for laser heating in silicon wafers. For model reduction, we use the balanced truncation method, considering both frequency-unrestricted and restricted cases. Additionally, the rational Krylov subspace method is applied to solve high-dimensional sparse matrix equations. To gain key physical insights, we use the COMSOL Multiphysics package. Finally, some numerical experiments are conducted using MATLAB to validate the proposed approach.

Source: Franklin Open

DOI: 10.1016/j.fraope.2024.100191

Authors: Md. Saiduzzaman, Md. Shafiqul Islam, Md. Sumon Hossain, M. Monir Uddin, Mohammad Osman Gani

Institutions: International University of Business Agriculture and Technology, North South University, Jahangirnagar University

Language: English

Topic: Model Reduction and Neural Networks

Subfield: Statistical and Nonlinear Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $1,900

Funders: Nova Southeastern University, North South University