Work

Miniaturized laser interferometer using dynamic current-wavelength modulation for high precision displacement measurement

Year: 2024

Type: article

Abstract: This study proposes a compact displacement measurement interferometer facilitated by a novel dynamic current-wavelength modulation method for high-precision displacement measurement. This technique compensates for the modulation depth by precisely predicting the optical path difference with frequency-scanning interferometry to achieve consistent modulation depth over an extensive measurement range. Additionally, a wavelength-locking method was developed for the 1550 nm band, using the P7 absorption peak of hydrogen cyanide gas to lock the central wavelength of the laser. The experimental results showed that the wavelength stability can be kept within 128 fm for 8 h with the proposed method. Furthermore, the deviations are less than 40 nm compared to a calibrated laser interferometer within the 300 mm measurement range. This research offers precise positioning feedback for precision engineering, paving the way for advanced semiconductor manufacturing processes.

Source: Measurement Science and Technology

DOI: 10.1088/1361-6501/ad96d2

Authors: Chen-Yu Liao, Hsi-Hui Lin, Wei-Hsin Chein, Liang-Chia Chen

Institution: National Taiwan University

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $3,165

Funder: National Science and Technology Council