A Quadrilateral Gas Sensor Cell by Complete MEMS Process for Gas Identification
Year: 2024
Type: article
Source: IEEE Sensors Journal
Institution: University of Science and Technology of China
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G3320988039, G437105022
OpenAlex ID: W4404688139