A Structural Impact Study and Process Optimization of FinFET Parasitic Capacitance
Year: 2024
Type: article
Authors: Yi Gu, Chengkang Tang, Xianghui Li, Qingqing Sun, David Wei Zhang, Hao Zhu
Institution: Fudan University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G8499616636
OpenAlex ID: W4404688712