Work

Scanning Micromirror Calibration Method Based on PSO-LSSVM Algorithm Prediction

Year: 2024

Type: article

Abstract: Scanning micromirrors represent a crucial component in micro-opto-electro-mechanical systems (MOEMS), with a broad range of applications across diverse fields. However, in practical applications, several factors inherent to the fabrication process and the surrounding usage environment exert a considerable influence on the accuracy of measurements obtained with the micromirror. Therefore, it is essential to calibrate the scanning micromirror and its measurement system. This paper presents a novel scanning micromirror calibration method based on the prediction of a particle swarm optimization-least squares support vector machine (PSO-LSSVM). The objective is to establish a correspondence between the actual deflection angle of the micromirror and the output of the measurement system employing a regression algorithm, thereby enabling the prediction of the tilt angle of the micromirror. The decision factor (R2) for this model at the x-axis reaches a value of 0.9947.

Source: Micromachines

DOI: 10.3390/mi15121413

Authors: Yan Liu, Xiang Cheng, Tingting Zhang, Yu Xu, Weijia Cai, Fengtian Han

Institutions: Jimei University, Xiamen University, Tsinghua University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,955

Funder: Jimei University