Work

Electron Beam Evaporation of Silicon Carbide to Produce Silicon-carbon Coatings

Year: 2024

Type: article

Source: High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/hightempmatproc.v29.i1.10

Authors: Victor A. Burdovitsin, I. Yu. Bakeev, L.J. Ngon, A. Kiki, Efim M. Oks, Andrey V. Tyunkov

Institutions: Tomsk State University of Control Systems and Radio-Electronics, Siberian Branch of the Russian Academy of Sciences, Institute of High Current Electronics

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404727556

FWCI: 0.411

Cites: 12

Cited by: 4

Related to: 10