Work

Parylene C for MEMS

Year: 2024

Type: book-chapter

Source: Elsevier eBooks

DOI: 10.1016/b978-0-323-95478-5.00033-9

Authors: Quentin Rezard, Ellis Meng

Institution: University of Southern California

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404733965

FWCI: 1.154

Cites: 248

Cited by: 1

Related to: 10