Work

SF6- and CF-based plasmas interaction with Si and SiO2 at room and cryogenic temperature: Insights from molecular dynamics simulation

Year: 2024

Type: conference-paper

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Authors: Cedillo, J. Romero, Cunge, G., Despiau-Pujo, E.

Institutions: Laboratoire des Technologies de la Microélectronique, Laboratoire d'Électronique des Technologies de l'Information

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404750294

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