Work

High-Tolerance Grating Couplers for Vertical Backside Coupling

Year: 2024
Type: article
Abstract: To facilitate convenient packaging of photonic integrated circuits on a fiber tip, a silicon grating coupler designed for vertical backside coupling has been developed. In order to comply with foundry capabilities and streamline the fabrication processes, the grating coupler features a minimum feature size larger than 200 nm and a single-etched structure on silicon. By inverse design-based optimization, the vertical backside grating coupler achieves a coupling efficiency of nearly 40% (−3.97 dB), while showcasing high fabrication and misalignment tolerance.
Language: English
Open Access status: gold
Estimated APC paid: $2,728
OpenAlex ID: W4404765484
FWCI: 0.52
Cites: 30
Cited by: 5
Related to: 10