Year: 2024
Type: article
Abstract: A graded composition superlattice structure is proposed by combining simulation with experimentation. The structural factors affecting graded symmetric superlattices and graded asymmetric superlattices and their action modes are simulated and analyzed. A Mg-doped graded symmetric superlattice structure with high Al content, excellent structural quality, good surface morphology and excellent electrical properties was grown by MOCVD equipment. The AlxGa1−xN superlattice with Al composition of 0.7 in the barrier exhibits a hole concentration of approximately 5 × 1015 cm−3 and a resistivity of 66 Ω·cm.
Source: Micromachines
DOI: 10.3390/mi15121420
Authors: Yang Liu, Xue Yang, Xiaowei Zhou, Peixian Li, Bo Yang, Zhuang Zhao, Yingru Xiang, Junchun Bai
Institution: Xidian University
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,955
Award: G6785438110
OpenAlex ID: W4404766438