Single Proof Mass Resonant MEMS Accelerometer With Parallel Motion Linkage Amplifier
Year: 2024
Type: article
Source: IEEE Sensors Letters
Authors: Alexandra Zobova, Maxim Drizovsky, Omer HaLevy, Neta Melech, Shmuel Livne, Slava Krylov
Institution: Tel Aviv University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4404787568