Work

Mode-Split MEMS Gyroscopes Under Bending Stress: Detection Mode Coupling and the Relation to Cross-Axis Sensitivity

Year: 2024

Type: article

Source: IEEE Sensors Letters

DOI: 10.1109/lsens.2024.3507212

Authors: Wolfram Mayer, Burkhard Kuhlmann, Andrea Guerrieri, Tobias Hiller, Andre Zimmermann

Institutions: Robert Bosch (Germany), University of Stuttgart

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404788012

FWCI: 0.312

Cites: 12

Cited by: 3

Related to: 10