Manufacturing of wire grid polarizer by laser interference lithography
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3036330
Authors: Zhipeng Zeng, Tianshi Lu, Sze Hian Tan, Fuyuan Deng, Shuonan Shan
Institution: Tsinghua University
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4404788301
