Work

Ensemble Learning-Fused Solution to the Inverse Problem in Integrated Optical Critical Dimension Metrology

Year: 2024

Type: article

Source: IEEE Transactions on Instrumentation and Measurement

DOI: 10.1109/tim.2024.3507037

Authors: Chunfu Guo, Jiamin Liu, Honggang Gu, Jinlong Zhu, Chuanwei Zhang, Xiuguo Chen, Hao Jiang, Shiyuan Liu

Institution: Huazhong University of Science and Technology

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, China Postdoctoral Science Foundation, Key Research and Development Program of Sichuan Province

Awards: G344793866, G3641333820, G3649973936, G7386132239, G758928501

OpenAlex ID: W4404788660

FWCI: 0.639

Cites: 51

Cited by: 6

Related to: 10