Work

Ultra-Thin Body, Short Channel Silicon Transistors Down to 3-nm Si Channel

Year: 2024

Type: article

Source: IEEE Electron Device Letters

DOI: 10.1109/led.2024.3507635

Authors: Jong Ho Park, Li-Chen Wang, Urmita Sikder, Shang-Lin Hsu, Chia-Chun Lee, Chirag Garg, Nirmaan Shanker, Suraj Cheema, Wenshen Li, Chenming Hu, Sayeef Salahuddin

Institution: University of California, Berkeley

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404788780

FWCI: 0.308

Cites: 21

Cited by: 3

Related to: 10