Microscopic chemical reaction mechanism of carbon contaminants on the surface of pulse-compressed gratings cleaned by low-pressure plasma
Year: 2024
Type: article
Source: Reaction Chemistry & Engineering
DOI: 10.1039/d4re00382a
Authors: Yuhai Li, Tianran Zheng, Qiang Yuan, Laixi Sun, Hao Liu, Xiaodong Yuan, Xin Zhang
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G7131527571
OpenAlex ID: W4404798889