Year: 2024
Type: conference-paper
Abstract: In integrated circuit design, the analysis of wafer map patterns is critical to improve yield and detect manufacturing issues. We develop Wafer2Spike, an architecture for wafer map pattern classification using a spiking neural network (SNN), and demonstrate that a well-trained SNN achieves superior performance compared to deep neural network-based solutions. Wafer2Spike achieves an average classification accuracy of 98% on the WM-811k wafer benchmark dataset. It is also superior to existing approaches for classifying defect patterns that are underrepresented in the original dataset. Wafer2Spike achieves this improved precision with great computational efficiency.
Authors: Abhishek Mishra, Suman Kumar, Anush Lingamoorthy, Anup Das, Nagarajan Kandasamy
Institution: Drexel University
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
Funder: National Science Foundation
OpenAlex ID: W4404847730