Fast and Accurate Curvilinear OPC with ML-Guided Curve Correction
Year: 2024
Type: conference-paper
Authors: Seohyun Kim, Gangmin Cho, Shilong Zhang, Youngsoo Shin
Institution: Korea Advanced Institute of Science and Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4404848372