Work

A novel methodology based on long short-term memory stacked autoencoders for unsupervised detection of abnormal working conditions in semiconductor manufacturing systems

Year: 2024

Type: article

Source: Proceedings of the Institution of Mechanical Engineers Part O Journal of Risk and Reliability

DOI: 10.1177/1748006x241296423

Authors: Fatemeh Hosseinpour, Ibrahim Ahmed, Piero Baraldi, Enrico Zio, Mehdi Behzad, Horst Lewitschnig

Institutions: Sharif University of Technology, Politecnico di Milano, Centre de Recherche sur les Risques et les Crises, École Nationale Supérieure des Mines de Paris, Infineon Technologies (Austria)

Language: English

Topic: Fault Detection and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funder: Electronic Components and Systems for European Leadership

Award: G7377157691

OpenAlex ID: W4404861684

FWCI: 0.472

Cites: 65

Cited by: 3

Related to: 10