Soft Sputtering of Large‐Area 2D MoS2 Layers Using Isolated Plasma Soft Deposition for Humidity Sensors
Year: 2024
Type: article
Source: Advanced Materials
Authors: Hye‐Young Youn, Tae‐Yang Choi, Junoh Shim, Se Young Park, Min‐Ki Kwon, Sunkook Kim, Han‐Ki Kim
Institutions: Sungkyunkwan University, Chosun University
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4404866515
