Work

In situ calorimetric temperature measurements of Cu, Cr, Ti targets during DC magnetron sputtering

Year: 2024

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0003994

Authors: Leonid R. Shaginyan, Mikhail I. Mironov, Anatoly I. Kuzmichev

Institutions: National Academy of Sciences of Ukraine, Frantsevich Institute for Problems in Materials Science, National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute”

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404964345

FWCI: 0.458

Cites: 13

Cited by: 3

Related to: 10