Work

Study of chip defect detection based on photoacoustic effect

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3051952

Authors: chunhui Li, Yuye Wang, Degang Xu, Jianquan Yao

Institution: Tianjin University

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404992264

FWCI:

Cites: 7

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Related to: 10