Work

Characterization of wafer surface morphology based on atomic force microscopy

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3036788

Authors: Yueqing Ding, Chong Yue, Lei Tao, Long Chen, Jin Zhou

Institution: Chongqing Metrology Quality Inspection and Research Institute

Language: English

Topic: Surface Roughness and Optical Measurements

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404992376

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Cites: 9

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Related to: 10