Work

Impact of Scaling Thickness on the Ferroelectric Properties of Pt/Al₀.₈Sc₀.₂N/Pt Capacitors

Year: 2024

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2024.3506513

Authors: Xiaoxi Li, Yuan Fang, Jiuren Zhou, Bochang Li, Zhifan Wu, Cizhe Fang, Xiangyu Zeng, Siying Zheng, Wei Mao, Yue Hao, Yan Liu, Genquan Han

Institution: Xidian University

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, China Postdoctoral Science Foundation

Awards: G1754546206, G4196760632, G4530294249, G6081603033, G7968582096, G821947838, G8553384389

OpenAlex ID: W4405022492

FWCI: 1.336

Cites: 40

Cited by: 13

Related to: 10