Work

High-Performance Film Bulk Acoustic Resonator and Filter Based on an Al0.8Sc0.2N Film Prepared by a Low-Temperature Staged Deposition Method

Year: 2024

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2024.3508659

Authors: Zhipeng Chen, Kaibin Xu, Tianyou Luo, Guowei Zhi, Yuhan Zhu, Peidong Ouyang, Guoqiang Li

Institutions: State Key Laboratory of Luminescent Materials and Devices, South China University of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Key Research and Development Program of China, China Aerospace Science and Technology Innovation Fund

Awards: G4383962025, G4934913847, G6091591738, G8064582225

OpenAlex ID: W4405022953

FWCI: 0.958

Cites: 39

Cited by: 9

Related to: 10