Work

Impact of Inhomogeneous Magnetic Fields on Polymer Deposition in Low‐Pressure Capacitively Coupled Ar/C4F8 Plasma

Year: 2024

Type: article

Source: Plasma Processes and Polymers

DOI: 10.1002/ppap.202400259

Authors: Jihoon Kim, Jonggu Han, Woojin Park, Sang Jun Park, Song Yi Baek, Byeongsun Yoo, Chulhwan Choi, Se Youn Moon

Institutions: Jeonbuk National University, Samsung Electronics (South Korea)

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Ministry of Education

OpenAlex ID: W4405025395

FWCI:

Cites: 43

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Related to: 10