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Semiconductor Wafer Particle Defect Classification Based on Deep Learning and Multimodal Feature Fusion

Year: 2024

Type: conference-paper

Source: IEEE International Conference on Computer Science and Network Technology (ICCSNT)

DOI: 10.1109/iccsnt62291.2024.10776716

Authors: Wenxin Liu, Guomeng Li, Qingsong Cui, Zeming Zhang, Xinxin Wang, Chengjie Bai

Institution: Shandong Normal University

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405104295

FWCI: 0.755

Cites: 15

Cited by: 1

Related to: 10