Chemical mechanism for nucleation enhancement in atomic layer deposition of Pt by surface functionalization
Year: 2024
Type: article
DOI: 10.1116/6.0004143
Authors: Sujin Kwon, Bonggeun Shong
Institution: Hongik University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G4185994775
OpenAlex ID: W4405105181