Work

Highly stable and conformal Ti–organic thin films from sustainable precursors via atomic/molecular layer deposition towards green energy applications

Year: 2024

Type: article

Abstract: Stable and conformal Ti–organic thin films from titanium isopropoxide and organic precursors (hydroquinone or benzene dicarboxylic acid) via ALD/MLD technique is reported; conformality is verified with lateral high-aspect-ratio structures.

Source: Chemical Communications

DOI: 10.1039/d4cc05425c

Authors: Anish Philip, Umaid Lone, Olga Partanen, Eero Haimi, Maarit Karppinen

Institution: Aalto University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Funders: Business Finland, H2020 European Research Council

Award: G4902330894