Work

Enhancement of Harmonic Heating by Magnetized Plasma Series Resonance in Capacitive Radio Frequency Discharges

Year: 2024

Type: article

Source: Physical Review Letters

DOI: 10.1103/physrevlett.133.235302

Authors: Jing-Yu Sun, Fei Gao, Fang-Jie Zhou, Julian Schulze, You-Nian Wang

Institutions: Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Ruhr University Bochum

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Deutsche Forschungsgemeinschaft, National Natural Science Foundation of China

Awards: TRR 87: Gepulste Hochleistungsplasmen zur Synthese nanostrukturierter Funktionsschichten, G1694248097, Elektronenheizung in kapazitiven RF Plasmen basierend auf Momenten der BoltzmannGleichung: Von fundamentalem Verständnis zu wissensbasierter Prozesskontrolle, 面向工业等离子体源的一些关键科学问题的研究

OpenAlex ID: W4405108914

FWCI: 0.625

Cites: 39

Cited by: 6

Related to: 10